General

• especially designed for high speed scanning applications
• cannot be used in all commercial SPMs and AFMs due to the small dimensions of the cantilevers
• cantilever and tip are supported by a single crystal silicon support chip
• no intrinsic stress and absolutely straight cantilevers

Cantilever

• rectangular cantilever with rounded corners at the freestanding end
• cantilever made of quartz-like material

Support Chip

• dimensions of the silicon support chip are very reproducible (3.4 mm x 1.6 mm x 0.3 mm)
• etched and lowered corners of the support chip avoid contact between the support chip and the sample
• alignment grooves on the back side of the silicon support chip in conjunction with the alignment chip ensure replacement of the probes without major readjustment of the laser beam

Tip

• nanotools® High Density Carbon/Diamond Like Carbon (HDC/DLC) tip
• tip height typically 2.5 μm and radius of curvature typically < 10 nm  
• tip aspect ratio typically 5:1 and tilt compensation of 8°