The Pyrex-Nitride probes have silicon nitride cantilevers with very low force constants and integrated oxide sharpened, pyramidal tips with a height of 3.5 µm. The tip is located 4µm behind the free end of the cantilever. This probe series features a support chip that is made of Pyrex. Two chip versions are available: The DB series with rectangular / diving board cantilevers and the TR series having triangular cantilevers. Both sides of the chip have identical cantilevers. All cantilevers are stress compensated and have a 70 nm chromium / gold backside coating for high laser reflectance.
All chips are pre-separated prior to shipment and come in Gel-Pak containers.
The typical tip radius of curvature of is below 10 nm. The cantilever bending is below 2°.
| Cantilever data* | 1 | 2 |
|---|---|---|
| Shape | Diving Board | |
| Overall Thickness** | 600 nm | 600 nm |
| Width | 40 µm | 40 µm |
| Length | 100 µm | 200 µm |
| Force Constant | 0.48 N/m | 0.06 N/m |
| Resonance Frequency | 67 kHz | 17 kHz |
| Order Code | Quantity | Data Sheet |
|---|---|---|
| PNP-DB-20 | 20 | Nominal values |
| PNP-DB-50 | 50 | Nominal values |
