The Pyrex-Nitride probes have silicon nitride cantilevers with very low force constants and integrated oxide sharpened, pyramidal tips with a height of 3.5 µm. The tip is located 4µm behind the free end of the cantilever. This probe series features a support chip that is made of Pyrex. Two chip versions are available: The DB series with rectangular / diving board cantilevers and the TR series having triangular cantilevers. Both sides of the chip have identical cantilevers. All cantilevers are stress compensated and have a 70 nm chromium / gold backside coating for high laser reflectance.
All chips are pre-separated prior to shipment and come in Gel-Pak containers.
The typical tip radius of curvature of is below 10 nm. The cantilever bending is below 2°.
|Thickness||0.5 µm||0.5 µm|
|Width||40 µm||40 µm|
|Length||100 µm||200 µm|
|Force Constant||0.48 N/m||0.06 N/m|
|Resonance Frequency||67 kHz||17 kHz|
|Order Code||Quantity||Data Sheet|