For enhanced resolution of microroughness and nanostructures we have developed an advanced tip manufacturing process leading to a further improvement of the tip sharpness with tip radii as small as 2 nm. With these AFM tips we have pushed back the frontiers of technology.
Tip Features The tip height is 10 - 15 μm and the typical radius of curvature of a SuperSharpSilicon™ tip is about 2 nm. We guarantee a tip radius smaller than 5 nm (guaranteed yield: 80%). The half cone angle is smaller than 10° at the last 200 nm of the tip.
High Aspect Ratio Tip (AR5/AR5T)
For measurements on samples with sidewall angles approaching 90°, e.g. deep trench measurements or other semiconductor applications, we offer two different types of High Aspect Ratio Tips showing near vertical sidewalls. These tips have an overall height of 10 - 15 μm which allows measurements on highly corrugated samples. At the last few micrometers the tips show a high aspect ratio portion that is symmetric when viewed from the side as well as along the cantilever axis. The tip radius is typically 10 nm (smaller than 15 nm guaranteed).
Tip Features The high aspect ratio portion of the AR5/AR5T tip is larger than 2 μm and shows an aspect ratio of typically 7:1 (minimum aspect ratio of 5:1 guaranteed). Consequently the half cone angle of the high aspect ratio portion is typically smaller than 5°. In order to get symmetrical images when scanning deep trenches it is necessary that the tip is perpendicular to the sample. Therefore, in order to compensate the most common tilt angle of 13° used in commercial AFMs, the high aspect ratio portion of the AR5T is tilted 13° with respect to the central axis of the tip.
Diamond Coated Tip (DT), Conductive Diamond Coated Tip (CDT)
For SPM and AFM applications that require hard contact between probe and sample we recommend our Diamond Coated Tip (DT). Some typical applications are friction force measurements, measurement of the elastic properties of samples, as well as wear measurements or nanostructuring. The Conductive Diamond Coated Tip (CDT) additionally offers a conductive, non passivated coating.
Tip and Coating Features True polycrystalline diamond coating on the tip side of the cantilever with the unsurpassed hardness of diamond. The tip height is 10 - 15 μm and the thickness of the diamond layer is approximately 100 nm. The macroscopic tip radius is in the range of 100 - 200 nm, but the tip often exhibits a nanoroughness in the 10 nm regime. The conductivity of the CDT coating is in the range of 0.003 - 0.005 Ohm•cm
For detailed information about our AFM probe product series please see below: