Arrow™ Silicon-SPM-Probes General Description

General

SPM probe for very high resolution imaging fits to all well-known commercial SPMs cantilever and tip are supported by a single crystal silicon holder monolithic design of holder, cantilever and tip tip is pointing into the <100> direction

Material Features

highly doped, single crystal silicon high conductivity of the doped silicon prevents electrostatic charging resistivity is as low as 0.01-0.025 Ohm*cm. no intrinsic stress and absolutely straight cantilevers no bending of cantilever by changing temperatures chemically inert silicon for application in fluids or electrochemical cells

Cantilever

rectangular cantilever that is shaped like an arrow trapezoidal cross section of the cantilever wide detector side for easy adjustment of the detection system small width at the tip side reduces damping

Holder

cantilever is fixed to a silicon holder dimensions of the holder are very reproducible (3.4 mm x 1.6 mm x 0.3 mm) replacement of the probe without major readjustment of the detection system etched corners of the holder avoid contact between the holder and the sample

Tip

tip has a tetrahedral shape and is located at the very end of the cantilever macroscopic half-cone angles are 30° to 35° seen along the cantilever axis are 20° to 25° seen from the side taper to virtually zero at the very end of the tip tip radii are typically better than 10 nm tip height is 10-15 µm