Type: Hybrid-Nitride™ Probe

Leading edge in sharpness and durability

NanoWorld Hybrid-Nitride™ probes are designed for contact mode operation in a wide range ofapplications, for example imaging of biological samples in liquids. The Hybrid-Nitride™ probes have silicon nitride cantilevers with very low force constants andintegrated oxide sharpened, pyramidal tips with a height of 3.5 µm (see Fig.2). This probe seriesfeatures two triangular cantilevers on one side and two rectangular cantilevers on the other sideof a support chip that is made of SU-8 epoxy material. All cantilevers are stress compensated andhave a 80nm chromium / titanium / gold backside coating for high laser reflectivity. The tip islocated 4µm behind the free end of the cantilever. The support chips (no glass strips!) havebeveled corners and integrated notches for easy handling and indication of the triangularcantilever side (see Fig.1). The typical tip radius of curvature of the oxide sharpened tips is below 15nm. The bending of the cantilevers is below 3°.

Fig. 1: Probe chip with cantilevers 1 - 4

Fig. 2: Cantilever with oxide sharpened, pyramidal tip

Cantilever #	1	2	3	4
Shape	Rectangular		Triangular
Overall Thickness	500 nm	500 nm	500 nm	500 nm
Length	100 µm	200 µm	100 µm	200 µm
Width (single beam)	40 µm	40 µm	14 µm	28 µm
Force Constant	0.26 N/m	0.03 N/m	0.17 N/m	0.05 N/m
Resonance Frequency	48 kHz	12 kHz	48 kHz	12 kHz
Please note: The above given mechanical properties are typical values.

Order Code	Quantity	Data Sheet
HNP-20	20	Nominal values
HNP-50	50	Nominal values

For more information contact: info@nanoworld.com
Product claims of licensed US Patent Nos. 5221415, 5399232 and 5580827. All data are subject to change without notice.	NanoWorld AG Rue Jaquet-Droz 1 Case Postale 216 CH-2002 Neuchâtel Switzerland www.nanoworld.com