Pointprobe® Silicon-SPM-Probes General Description

General

SPM probe for very high resolution imaging fits to all well-known commercial SPMs monolithic design of holder, cantilever and tip tip is pointing into the <100> direction cantilever and tip are supported by a single crystal silicon holder

Material Features

highly doped, single crystal silicon high conductivity of the doped silicon avoids electrostatic charging resistively is as low as 0.01-0.025 Ohm*cm. no intrinsic stress and absolutely straight cantilevers no bending of cantilever by changing temperatures chemically inert silicon for application in fluids or electrochemical cells

Cantilever

trapezoidal cross section of the cantilever rather wide detector side for easy adjustment small width at the tip side reduces the damages

Holder

cantilever is fixed to a silicon holder dimensions of the holder are very reproducible replacement of probe without major readjustment etched corners of the holder avoid contact between the holder and the sample

Tip

tip has a tetrahedral shape and is located at the very end of the cantilever macroscopic half-cone angles are 20° to 25° seen along the cantilever axis are 25° to 30° seen from the side taper to virtually zero at the very end of the tip tip radii are typically better than 10 nm tip height is 10-15 µm