ARROW Silicon-afm-probes

ARROW™
SILICON AFM PROBES

Optimized positioning through maximized tip visibility

Arrow™ Top View

Arrow™ Front View

Special tip shape leads to extremely symmetric scan image in x- and
y- direction when probe is tilted due to its mounting on the AFM head.

 

General

  • SPM and AFM probes for high resolution imaging
  • fit to all well-known commercial SPMs and AFMs
  • cantilever and tip are supported by a single crystal silicon support chip
  • monolithic design of support chip, cantilever and tip

Material Features

  • highly doped, single crystal silicon (resistivity 0.01 - 0.025 Ohm.cm)
  • no intrinsic stress and absolutely straight cantilevers
  • chemically inert silicon for applications in fluids or electrochemical cells

Cantilever

  • rectangular cantilever with triangular free end
  • easy positioning of tip on the area of interest due to the Arrow™ shape
  • consistent distance between tip and cantilever end
  • trapezoidal cross section with wide detector side for easy laser adjustment

Support Chip

  • dimensions of the support chip are very reproducible (3.4 mm x 1.6 mm x 0.3 mm)
  • etched corners of the support chip avoid contact between the support chip and the sample

Tip

  • tip height 10 - 15 µm and radius of curvature typically < 10 nm (< 15 nm guaranteed)
  • macroscopic half-cone angles
    - 30° to 35° seen along the cantilever axis
    - 20° to 25° seen from the side

Package Sizes

  • packages of 10, 20 or 50 AFM probes
  • full wafer of at least 380 AFM probes

 

AVAILABLE COATINGS

Aluminum Reflex Coating

  • 30 nm thick aluminum reflex coating
    on the detector side of the cantilever
  • enhances reflectance of the
    laser beam by a factor of 2.5
  • prevents light from interfering within the cantilever

PtIr5 Coating

  • 25 nm thick platinum iridium5 coating on both sides of the probe
  • stress-compensated and wear resistant
  • detector side coating enhances the reflectance of the laser beam by a factor of 2
  • allows electrical measurements

  • Other coatings for standard SPM and AFM probes available on request
  • ARROW™ Ultra High Frequency Scanning Probes (UHF)
    ARROW™ Tipless Cantilevers and Cantilever Arrays (TL)

    Arrow™ UHF 3D-View

    Arrow™ UHF 3D-View

    Arrow™ UHF 3D-View Close-up

    Arrow™ UHF 3D-View Close-up

    Arrow™ UHF

    Arrow™ UHF

     

    Arrow™ UHF

    The Arrow™ UHF probes feature a cantilever capable of resonating with a frequency of up to 2 MHz. These probes combine outstanding sensitivity with fast scanning ability. As for all probes of the Arrow™ series, the Arrow™ UHF probes are made from monolithic silicon which is highly doped to dissipate static charge. It is chemically inert and offers a high mechanical Q-factor for high sensitivity.


    The Arrow™ UHF probes feature a 35 µm long triangular cantileverand a tetrahedral tip with a height of
    3 µm and a radius of curvature smaller than 10 nm. The unique Arrow™ shape allows easy positioning of the tip on the area of interest.


    The reflex coating (thin aluminum layer, gold reflex coating also optionally available) on the detector side of the cantilever enhances the reflectance of the laser beam by a factor of 2.5 and prevents light from interfering within the cantilever.







    Arrow™ TL (Tipless Cantilevers for Special Applications)

    The Arrow™ TL SPM and AFM probes have tipless cantilevers and are available with either 1 cantilever or with cantilever arrays consisting of 2 or 8 rectangular cantilevers with a triangular free end.

    All types of the Arrow™ TL series are optionally available with a gold coating on the sample facing side of the cantilever.

    Cantilever Data  
    Resonance Frequency 6 kHz
    Force Constant 0.03 N/m
    Length 500 µm
    Width (rectangular part) 100 µm
    Thickness 1.0 µm

    Arrow™ TL1
    Tipless cantilever,
    single cantilever beam on a silicon support chip

    Arrow™ TL2
    Tipless cantilever array,
    two cantilever beams on a single silicon support chip

    Arrow™ TL8
    Tipless cantilever array, eight
    cantilever beams on a single silicon support chip