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- General
- • contact mode SPM probe for wide range of applications
- • fits to all well-known commercial SPMs
- • silicon nitride cantilevers and tips
- • cantilevers are supported by a holder chip made of SU-8 epoxy (hybrid design)
- • suitable for operation in liquids
- Material Features
- • low-stress silicon nitride for lowest cantilever bending
- • excellent hardness for wear resistance and extended lifetime
- • SU-8 epoxy allowing for single holder design
- Cantilever
- • multi-lever design with two rectangular and two triangular cantilevers
- • reflective chromium / titanium/ gold coating on the backside of the cantilevers
- • stress compensated with bending below 3°
- Support Chip
- • made of SU-8 epoxy material (3.4mm x 1.5mm x 0.2mm)
- • beveled corner design avoids mechanical contact between chip and sample
- • notch design for clear indication of cantilever type (notch near triangular cantilevers)
- • easy handling due to single holder chip
- Tip
- • oxide sharpened pyramidal probe tip
- • tip height 3.5 µm and tip radius of curvature typically < 15 nm
- • macroscopic half-cone angles 35°
- Package sizes
- • 20 and 50 probes
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