This compensates the tilt angle of the cantilever that results from mounting the probe to the AFM head. This unique feature allows absolutely symmetrical imaging of near-vertical sidewalls. Therefore these tips can be perfectly used to characterize to slope of steep sidewalls.

Tip Features AR5T

• Moreover the high aspect ratio portion is tilted 13° with respect to the center axis of the tip allowing absolutely symmetrical imaging

• The tip height is 10 to 15µm allowing measurements on highly corrugated samples

• The tip radius is typically 10nm

• The tip has a high aspect ratio portion that is larger than 2 µm

• This portion is symmetric when viewed from the side as well as along the cantilever axis and shows an aspect ratio of typically 7:1

For high quality deep trench measurements a high aspect ratio tip is highly recommended in order to magnify the region of interest. With a tilted high aspect ratio tip, the performance of the measurement can be enhanced even further by offering a more symmetrically scan.